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Electron Microprobe

Department of Geology
University of California, Santa Barbara, CA 93106-9630 USA

Our 1993 Cameca SX-50 is fitted with 5 wavelength-dispersive spectrometers and a Be-window SiLi PGT energy dispersive detector. The instrument is fully automated with Sun Microsystems hardware. We have over 100 standard reference materials for quantitative bulk or thin film analysis.

The instrument is capable of analyzing the light elements B, C, N, O, and F with a detection limit of about 300-1000 ppm and the heavier elements Na through U with a detection limit/sensitivity of about 30-300 ppm (depending on mean atomic number of the matrix and x-ray counting times).

The spatial resolution for quantitative analysis is of the order of 1 to 3 microns. The spatial resolution for secondary and backscattered electron imaging is approximately 100 to 200 nm. All of these depend on accelerating voltage, beam current and sample composition.

Digital images of secondary electrons, back-scattered electrons and characteristic x-rays can easily be captured and exported.

Contact Bradley Hacker (hacker@geol.ucsb.edu) or Gareth Seward (seward@geol.ucsb.edu) if you would like to use this facility.

Quantitative garnet zoning map

Secondary electron image of Mg2SiO4 olivine, showing broad-beam (20 um) quantitative montage


Back-scattered electron image of submicron-scale FeTiO3 rods (bright) in Mg2SiO4 olivine (dark)


Energy-dispersive spectrum of olivine and titanate

Differences between electron-probe microanalysis and analytical electron microscopy during transmission electron microscopy